Effect of tool rake angle on surface quality of single-crystal silicon during ultra-precision machining

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Journal of Shenyang Aerospace University ›› 2020, Vol. 37 ›› Issue (4) : 40-46.

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2020, 37(4): 40-46

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Received	Revised	Published
2019-11-19	2019-12-16	2020-08-25
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2020-10-10

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