Effect of tool rake angle on surface quality of single-crystal silicon during ultra-precision machining

WANG Ming-Hai; WANG Fu-Ning; WANG Ben; LIU Qi; YOU Si-Yao

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Journal of Shenyang Aerospace University ›› 2020, Vol. 37 ›› Issue (4) : 40-46.

Effect of tool rake angle on surface quality of single-crystal silicon during ultra-precision machining

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2019-11-19	2019-12-16	2020-08-25
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2020-08-25

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